8/22/2010	12:42:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	12:42:54 PM	Recipe started at 12:42 PM
8/22/2010	12:42:54 PM	H2 valve closed
8/22/2010	12:42:54 PM	BCl3 valve closed
8/22/2010	12:42:54 PM	PH3 valve closed
8/22/2010	12:42:54 PM	SiCl4 pre valve closed
8/22/2010	12:42:54 PM	SiCl4 post valve closed
8/22/2010	12:42:54 PM	Main Vac valve closed
8/22/2010	12:42:54 PM	Bypass valve closed
8/22/2010	12:42:54 PM	Bubbler valve closed
8/22/2010	12:42:54 PM	Helium valve opened
8/22/2010	12:42:54 PM	Helium MFC set to  500.000000
8/22/2010	12:42:54 PM	H2 MFC set to  0.000000
8/22/2010	12:42:54 PM	BCl3 MFC set to  0.000000
8/22/2010	12:42:54 PM	PHl3 MFC set to  0.000000
8/22/2010	12:42:54 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:42:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:42:54 PM	Tube furnace set to 0
8/22/2010	12:44:15 PM	Helium valve closed
8/22/2010	12:44:15 PM	H2 valve closed
8/22/2010	12:44:15 PM	BCl3 valve closed
8/22/2010	12:44:15 PM	PH3 valve closed
8/22/2010	12:44:15 PM	SiCl4 pre valve closed
8/22/2010	12:44:15 PM	SiCl4 post valve closed
8/22/2010	12:44:15 PM	Main Vac valve closed
8/22/2010	12:44:15 PM	Bypass valve closed
8/22/2010	12:44:15 PM	Bubbler valve closed
8/22/2010	12:44:15 PM	Helium MFC set to  0.000000
8/22/2010	12:44:15 PM	H2 MFC set to  0.000000
8/22/2010	12:44:15 PM	BCl3 MFC set to  0.000000
8/22/2010	12:44:15 PM	PHl3 MFC set to  0.000000
8/22/2010	12:44:15 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:44:15 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:44:15 PM	Tube furnace set to 0
8/22/2010	12:44:15 PM	Run finished at 12:44 PM
8/22/2010	12:44:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	12:46:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2010	12:46:06 PM	Recipe started at 12:46 PM
8/22/2010	12:46:06 PM	Helium valve closed
8/22/2010	12:46:06 PM	H2 valve closed
8/22/2010	12:46:06 PM	BCl3 valve closed
8/22/2010	12:46:06 PM	PH3 valve closed
8/22/2010	12:46:06 PM	SiCl4 pre valve closed
8/22/2010	12:46:06 PM	SiCl4 post valve closed
8/22/2010	12:46:06 PM	Main Vac valve closed
8/22/2010	12:46:06 PM	Bubbler valve closed
8/22/2010	12:46:06 PM	Bypass valve opened
8/22/2010	12:46:06 PM	Helium MFC set to  0.000000
8/22/2010	12:46:06 PM	H2 MFC set to  0.000000
8/22/2010	12:46:06 PM	BCl3 MFC set to  0.000000
8/22/2010	12:46:06 PM	PHl3 MFC set to  0.000000
8/22/2010	12:46:06 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:46:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:46:07 PM	Tube furnace set to 0
8/22/2010	12:46:45 PM	Helium valve closed
8/22/2010	12:46:45 PM	H2 valve closed
8/22/2010	12:46:45 PM	BCl3 valve closed
8/22/2010	12:46:45 PM	PH3 valve closed
8/22/2010	12:46:45 PM	SiCl4 pre valve closed
8/22/2010	12:46:45 PM	SiCl4 post valve closed
8/22/2010	12:46:45 PM	Bubbler valve closed
8/22/2010	12:46:45 PM	Main Vac valve opened
8/22/2010	12:46:45 PM	Bypass valve opened
8/22/2010	12:46:45 PM	Helium MFC set to  0.000000
8/22/2010	12:46:45 PM	H2 MFC set to  0.000000
8/22/2010	12:46:45 PM	BCl3 MFC set to  0.000000
8/22/2010	12:46:45 PM	PHl3 MFC set to  0.000000
8/22/2010	12:46:45 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:46:45 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:46:45 PM	Tube furnace set to 0
8/22/2010	12:46:45 PM	Run finished at 12:46 PM
8/22/2010	12:46:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2010	12:58:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	12:58:05 PM	Recipe started at 12:58 PM
8/22/2010	12:58:05 PM	H2 valve closed
8/22/2010	12:58:05 PM	BCl3 valve closed
8/22/2010	12:58:05 PM	PH3 valve closed
8/22/2010	12:58:05 PM	SiCl4 pre valve closed
8/22/2010	12:58:05 PM	SiCl4 post valve closed
8/22/2010	12:58:05 PM	Main Vac valve closed
8/22/2010	12:58:05 PM	Bypass valve closed
8/22/2010	12:58:05 PM	Bubbler valve closed
8/22/2010	12:58:05 PM	Helium valve opened
8/22/2010	12:58:05 PM	Helium MFC set to  500.000000
8/22/2010	12:58:05 PM	H2 MFC set to  0.000000
8/22/2010	12:58:05 PM	BCl3 MFC set to  0.000000
8/22/2010	12:58:05 PM	PHl3 MFC set to  0.000000
8/22/2010	12:58:05 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:58:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:58:06 PM	Tube furnace set to 0
8/22/2010	12:59:27 PM	Helium valve closed
8/22/2010	12:59:27 PM	H2 valve closed
8/22/2010	12:59:27 PM	BCl3 valve closed
8/22/2010	12:59:27 PM	PH3 valve closed
8/22/2010	12:59:27 PM	SiCl4 pre valve closed
8/22/2010	12:59:27 PM	SiCl4 post valve closed
8/22/2010	12:59:27 PM	Main Vac valve closed
8/22/2010	12:59:27 PM	Bypass valve closed
8/22/2010	12:59:27 PM	Bubbler valve closed
8/22/2010	12:59:27 PM	Helium MFC set to  0.000000
8/22/2010	12:59:27 PM	H2 MFC set to  0.000000
8/22/2010	12:59:27 PM	BCl3 MFC set to  0.000000
8/22/2010	12:59:27 PM	PHl3 MFC set to  0.000000
8/22/2010	12:59:27 PM	SiCl4 MFC set to  0.000000
8/22/2010	12:59:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	12:59:27 PM	Tube furnace set to 0
8/22/2010	12:59:27 PM	Run finished at 12:59 PM
8/22/2010	12:59:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	1:08:55 PM	Recipe started at 1:08 PM
8/22/2010	1:08:55 PM	Helium valve closed
8/22/2010	1:08:55 PM	BCl3 valve closed
8/22/2010	1:08:55 PM	PH3 valve closed
8/22/2010	1:08:55 PM	SiCl4 pre valve closed
8/22/2010	1:08:55 PM	SiCl4 post valve closed
8/22/2010	1:08:55 PM	Main Vac valve closed
8/22/2010	1:08:55 PM	Bypass valve closed
8/22/2010	1:08:55 PM	Bubbler valve closed
8/22/2010	1:08:55 PM	H2 valve opened
8/22/2010	1:08:55 PM	Helium MFC set to  0.000000
8/22/2010	1:08:55 PM	H2 MFC set to  500.000000
8/22/2010	1:08:55 PM	BCl3 MFC set to  0.000000
8/22/2010	1:08:55 PM	PHl3 MFC set to  0.000000
8/22/2010	1:08:55 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:08:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:08:55 PM	Tube furnace set to 0
8/22/2010	1:08:58 PM	Helium valve closed
8/22/2010	1:08:58 PM	BCl3 valve closed
8/22/2010	1:08:58 PM	PH3 valve closed
8/22/2010	1:08:58 PM	SiCl4 pre valve closed
8/22/2010	1:08:58 PM	SiCl4 post valve closed
8/22/2010	1:08:58 PM	Main Vac valve closed
8/22/2010	1:08:58 PM	Bypass valve closed
8/22/2010	1:08:58 PM	H2 valve opened
8/22/2010	1:08:58 PM	Bubbler valve opened
8/22/2010	1:08:59 PM	Helium MFC set to  0.000000
8/22/2010	1:08:59 PM	H2 MFC set to  500.000000
8/22/2010	1:08:59 PM	BCl3 MFC set to  0.000000
8/22/2010	1:08:59 PM	PHl3 MFC set to  0.000000
8/22/2010	1:08:59 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:08:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:08:59 PM	Tube furnace set to 0
8/22/2010	1:11:55 PM	Run aborted at 1:11 PM
8/22/2010	1:11:55 PM	Helium valve closed
8/22/2010	1:11:55 PM	H2 valve closed
8/22/2010	1:11:55 PM	BCl3 valve closed
8/22/2010	1:11:55 PM	PH3 valve closed
8/22/2010	1:11:55 PM	SiCl4 pre valve closed
8/22/2010	1:11:55 PM	SiCl4 post valve closed
8/22/2010	1:11:55 PM	Bypass valve closed
8/22/2010	1:11:55 PM	Main Vac valve closed
8/22/2010	1:11:55 PM	Bubbler valve closed
8/22/2010	1:11:55 PM	Helium MFC set to  0.000000
8/22/2010	1:11:55 PM	H2 MFC set to  0.000000
8/22/2010	1:11:55 PM	BCl3 MFC set to  0.000000
8/22/2010	1:11:55 PM	PHl3 MFC set to  0.000000
8/22/2010	1:11:55 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:11:55 PM	Tube furnace set to 0
8/22/2010	1:13:35 PM	Recipe started at 1:13 PM
8/22/2010	1:13:35 PM	Helium valve closed
8/22/2010	1:13:35 PM	BCl3 valve closed
8/22/2010	1:13:35 PM	PH3 valve closed
8/22/2010	1:13:35 PM	SiCl4 pre valve closed
8/22/2010	1:13:35 PM	SiCl4 post valve closed
8/22/2010	1:13:35 PM	Main Vac valve closed
8/22/2010	1:13:35 PM	Bypass valve closed
8/22/2010	1:13:35 PM	Bubbler valve closed
8/22/2010	1:13:35 PM	H2 valve opened
8/22/2010	1:13:35 PM	Helium MFC set to  0.000000
8/22/2010	1:13:35 PM	H2 MFC set to  500.000000
8/22/2010	1:13:35 PM	BCl3 MFC set to  0.000000
8/22/2010	1:13:35 PM	PHl3 MFC set to  0.000000
8/22/2010	1:13:35 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:13:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:13:35 PM	Tube furnace set to 0
8/22/2010	1:13:37 PM	Helium valve closed
8/22/2010	1:13:37 PM	BCl3 valve closed
8/22/2010	1:13:37 PM	PH3 valve closed
8/22/2010	1:13:37 PM	SiCl4 pre valve closed
8/22/2010	1:13:37 PM	SiCl4 post valve closed
8/22/2010	1:13:37 PM	Main Vac valve closed
8/22/2010	1:13:37 PM	Bypass valve closed
8/22/2010	1:13:37 PM	H2 valve opened
8/22/2010	1:13:37 PM	Bubbler valve opened
8/22/2010	1:13:37 PM	Helium MFC set to  0.000000
8/22/2010	1:13:37 PM	H2 MFC set to  500.000000
8/22/2010	1:13:37 PM	BCl3 MFC set to  0.000000
8/22/2010	1:13:37 PM	PHl3 MFC set to  0.000000
8/22/2010	1:13:37 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:13:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:13:37 PM	Tube furnace set to 0
8/22/2010	1:13:37 PM	Helium valve closed
8/22/2010	1:13:37 PM	H2 valve closed
8/22/2010	1:13:37 PM	BCl3 valve closed
8/22/2010	1:13:37 PM	PH3 valve closed
8/22/2010	1:13:37 PM	SiCl4 pre valve closed
8/22/2010	1:13:37 PM	SiCl4 post valve closed
8/22/2010	1:13:37 PM	Main Vac valve closed
8/22/2010	1:13:37 PM	Bubbler valve closed
8/22/2010	1:13:37 PM	Bypass valve closed
8/22/2010	1:13:37 PM	Helium MFC set to  0.000000
8/22/2010	1:13:37 PM	H2 MFC set to  0.000000
8/22/2010	1:13:37 PM	BCl3 MFC set to  0.000000
8/22/2010	1:13:37 PM	PHl3 MFC set to  0.000000
8/22/2010	1:13:37 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:13:37 PM	Bypass solenoid MFC set to  760.000000
8/22/2010	1:13:37 PM	Tube furnace set to 0
8/22/2010	1:13:37 PM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
8/22/2010	1:14:15 PM	Run aborted at 1:14 PM
8/22/2010	1:15:37 PM	H2 valve closed
8/22/2010	1:15:38 PM	Bubbler valve closed
8/22/2010	1:15:44 PM	Recipe started at 1:15 PM
8/22/2010	1:15:44 PM	Helium valve closed
8/22/2010	1:15:44 PM	BCl3 valve closed
8/22/2010	1:15:44 PM	PH3 valve closed
8/22/2010	1:15:44 PM	SiCl4 pre valve closed
8/22/2010	1:15:44 PM	SiCl4 post valve closed
8/22/2010	1:15:44 PM	Main Vac valve closed
8/22/2010	1:15:44 PM	Bypass valve closed
8/22/2010	1:15:44 PM	H2 valve opened
8/22/2010	1:15:44 PM	Bubbler valve opened
8/22/2010	1:15:44 PM	Helium MFC set to  0.000000
8/22/2010	1:15:44 PM	H2 MFC set to  500.000000
8/22/2010	1:15:44 PM	BCl3 MFC set to  0.000000
8/22/2010	1:15:44 PM	PHl3 MFC set to  0.000000
8/22/2010	1:15:44 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:15:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:15:44 PM	Tube furnace set to 0
8/22/2010	1:45:44 PM	Helium valve closed
8/22/2010	1:45:44 PM	BCl3 valve closed
8/22/2010	1:45:44 PM	PH3 valve closed
8/22/2010	1:45:44 PM	SiCl4 pre valve closed
8/22/2010	1:45:44 PM	SiCl4 post valve closed
8/22/2010	1:45:44 PM	Main Vac valve closed
8/22/2010	1:45:44 PM	Bypass valve closed
8/22/2010	1:45:44 PM	Bubbler valve closed
8/22/2010	1:45:44 PM	H2 valve opened
8/22/2010	1:45:44 PM	Helium MFC set to  0.000000
8/22/2010	1:45:44 PM	H2 MFC set to  500.000000
8/22/2010	1:45:44 PM	BCl3 MFC set to  0.000000
8/22/2010	1:45:44 PM	PHl3 MFC set to  0.000000
8/22/2010	1:45:44 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:45:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	1:45:44 PM	Tube furnace set to 700
8/22/2010	1:46:02 PM	Helium valve closed
8/22/2010	1:46:02 PM	H2 valve closed
8/22/2010	1:46:02 PM	BCl3 valve closed
8/22/2010	1:46:02 PM	PH3 valve closed
8/22/2010	1:46:02 PM	SiCl4 pre valve closed
8/22/2010	1:46:02 PM	SiCl4 post valve closed
8/22/2010	1:46:02 PM	Main Vac valve closed
8/22/2010	1:46:02 PM	Bubbler valve closed
8/22/2010	1:46:02 PM	Bypass valve opened
8/22/2010	1:46:02 PM	Helium MFC set to  0.000000
8/22/2010	1:46:02 PM	H2 MFC set to  0.000000
8/22/2010	1:46:02 PM	BCl3 MFC set to  0.000000
8/22/2010	1:46:02 PM	PHl3 MFC set to  0.000000
8/22/2010	1:46:02 PM	SiCl4 MFC set to  0.000000
8/22/2010	1:46:02 PM	Bypass solenoid MFC set to  760.000000
8/22/2010	1:46:02 PM	Tube furnace set to 0
8/22/2010	1:46:02 PM	Baratron reads 900.567492 Torr.  Emergency exit.
8/22/2010	4:35:47 PM	Run aborted at 4:35 PM
8/22/2010	4:36:18 PM	H2 valve closed
8/22/2010	4:36:19 PM	Bubbler valve closed
8/22/2010	4:36:29 PM	Tube furnace set to 0
8/22/2010	4:36:31 PM	H2 valve opened
8/22/2010	4:36:38 PM	Bypass valve opened
8/22/2010	4:36:38 PM	Bypass valve closed
8/22/2010	4:36:40 PM	Main Vac valve opened
8/22/2010	4:36:41 PM	Main Vac valve closed
8/22/2010	4:36:44 PM	H2 valve closed
8/22/2010	4:36:48 PM	Bypass valve opened
8/22/2010	4:36:49 PM	Bypass valve closed
8/22/2010	4:36:51 PM	H2 valve opened
8/22/2010	4:36:52 PM	H2 valve closed
8/22/2010	4:36:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	4:36:56 PM	Recipe started at 4:36 PM
8/22/2010	4:36:56 PM	H2 valve closed
8/22/2010	4:36:56 PM	BCl3 valve closed
8/22/2010	4:36:56 PM	PH3 valve closed
8/22/2010	4:36:56 PM	SiCl4 pre valve closed
8/22/2010	4:36:56 PM	SiCl4 post valve closed
8/22/2010	4:36:56 PM	Main Vac valve closed
8/22/2010	4:36:56 PM	Bypass valve closed
8/22/2010	4:36:56 PM	Bubbler valve closed
8/22/2010	4:36:56 PM	Helium valve opened
8/22/2010	4:36:56 PM	Helium MFC set to  500.000000
8/22/2010	4:36:56 PM	H2 MFC set to  0.000000
8/22/2010	4:36:56 PM	BCl3 MFC set to  0.000000
8/22/2010	4:36:56 PM	PHl3 MFC set to  0.000000
8/22/2010	4:36:56 PM	SiCl4 MFC set to  0.000000
8/22/2010	4:36:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	4:36:56 PM	Tube furnace set to 0
8/22/2010	4:38:16 PM	Helium valve closed
8/22/2010	4:38:16 PM	H2 valve closed
8/22/2010	4:38:16 PM	BCl3 valve closed
8/22/2010	4:38:16 PM	PH3 valve closed
8/22/2010	4:38:16 PM	SiCl4 pre valve closed
8/22/2010	4:38:16 PM	SiCl4 post valve closed
8/22/2010	4:38:16 PM	Main Vac valve closed
8/22/2010	4:38:16 PM	Bypass valve closed
8/22/2010	4:38:16 PM	Bubbler valve closed
8/22/2010	4:38:16 PM	Helium MFC set to  0.000000
8/22/2010	4:38:16 PM	H2 MFC set to  0.000000
8/22/2010	4:38:16 PM	BCl3 MFC set to  0.000000
8/22/2010	4:38:16 PM	PHl3 MFC set to  0.000000
8/22/2010	4:38:16 PM	SiCl4 MFC set to  0.000000
8/22/2010	4:38:16 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	4:38:16 PM	Tube furnace set to 0
8/22/2010	4:38:16 PM	Run finished at 4:38 PM
8/22/2010	4:38:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2010	4:38:23 PM	H2 MFC set to  500.000000
8/22/2010	4:38:24 PM	H2 valve opened
8/22/2010	4:38:29 PM	Bubbler valve opened
8/22/2010	4:38:38 PM	Tube furnace set to 700
8/22/2010	4:39:38 PM	Bubbler valve closed
8/22/2010	4:39:38 PM	H2 valve closed
8/22/2010	4:39:59 PM	Recipe started at 4:39 PM
8/22/2010	4:39:59 PM	Helium valve closed
8/22/2010	4:39:59 PM	BCl3 valve closed
8/22/2010	4:39:59 PM	PH3 valve closed
8/22/2010	4:39:59 PM	SiCl4 pre valve closed
8/22/2010	4:39:59 PM	SiCl4 post valve closed
8/22/2010	4:39:59 PM	Main Vac valve closed
8/22/2010	4:39:59 PM	Bypass valve closed
8/22/2010	4:39:59 PM	H2 valve opened
8/22/2010	4:39:59 PM	Bubbler valve opened
8/22/2010	4:39:59 PM	Helium MFC set to  0.000000
8/22/2010	4:39:59 PM	H2 MFC set to  500.000000
8/22/2010	4:39:59 PM	BCl3 MFC set to  0.000000
8/22/2010	4:39:59 PM	PHl3 MFC set to  0.000000
8/22/2010	4:39:59 PM	SiCl4 MFC set to  0.000000
8/22/2010	4:39:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	4:39:59 PM	Tube furnace set to 0
8/22/2010	4:49:59 PM	Helium valve closed
8/22/2010	4:49:59 PM	BCl3 valve closed
8/22/2010	4:49:59 PM	PH3 valve closed
8/22/2010	4:49:59 PM	SiCl4 pre valve closed
8/22/2010	4:49:59 PM	SiCl4 post valve closed
8/22/2010	4:49:59 PM	Main Vac valve closed
8/22/2010	4:49:59 PM	Bypass valve closed
8/22/2010	4:49:59 PM	Bubbler valve closed
8/22/2010	4:49:59 PM	H2 valve opened
8/22/2010	4:49:59 PM	Helium MFC set to  0.000000
8/22/2010	4:49:59 PM	H2 MFC set to  500.000000
8/22/2010	4:49:59 PM	BCl3 MFC set to  0.000000
8/22/2010	4:49:59 PM	PHl3 MFC set to  0.000000
8/22/2010	4:49:59 PM	SiCl4 MFC set to  0.000000
8/22/2010	4:49:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	4:50:00 PM	Tube furnace set to 700
8/22/2010	4:50:13 PM	Run aborted at 4:50 PM
8/22/2010	4:50:13 PM	Helium valve closed
8/22/2010	4:50:13 PM	H2 valve closed
8/22/2010	4:50:13 PM	BCl3 valve closed
8/22/2010	4:50:13 PM	PH3 valve closed
8/22/2010	4:50:13 PM	SiCl4 pre valve closed
8/22/2010	4:50:13 PM	SiCl4 post valve closed
8/22/2010	4:50:13 PM	Bypass valve closed
8/22/2010	4:50:13 PM	Main Vac valve closed
8/22/2010	4:50:13 PM	Bubbler valve closed
8/22/2010	4:50:13 PM	Helium MFC set to  0.000000
8/22/2010	4:50:13 PM	H2 MFC set to  0.000000
8/22/2010	4:50:13 PM	BCl3 MFC set to  0.000000
8/22/2010	4:50:13 PM	PHl3 MFC set to  0.000000
8/22/2010	4:50:13 PM	SiCl4 MFC set to  0.000000
8/22/2010	4:50:13 PM	Tube furnace set to 0
8/22/2010	4:50:23 PM	Tube furnace set to 700
8/22/2010	4:50:27 PM	H2 MFC set to  500.000000
8/22/2010	4:50:31 PM	H2 valve opened
8/22/2010	4:50:32 PM	Bubbler valve opened
8/22/2010	4:53:44 PM	Tube furnace set to 800
8/22/2010	4:57:38 PM	Tube furnace set to 700
8/22/2010	5:51:56 PM	Tube furnace set to 0
8/22/2010	6:29:38 PM	Bubbler valve closed
8/22/2010	6:29:38 PM	H2 valve closed
8/22/2010	6:34:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2010	6:34:00 PM	Recipe started at 6:34 PM
8/22/2010	6:34:00 PM	Helium valve closed
8/22/2010	6:34:00 PM	H2 valve closed
8/22/2010	6:34:00 PM	BCl3 valve closed
8/22/2010	6:34:00 PM	PH3 valve closed
8/22/2010	6:34:00 PM	SiCl4 pre valve closed
8/22/2010	6:34:00 PM	SiCl4 post valve closed
8/22/2010	6:34:00 PM	Main Vac valve closed
8/22/2010	6:34:00 PM	Bubbler valve closed
8/22/2010	6:34:00 PM	Bypass valve opened
8/22/2010	6:34:00 PM	Helium MFC set to  0.000000
8/22/2010	6:34:00 PM	H2 MFC set to  0.000000
8/22/2010	6:34:00 PM	BCl3 MFC set to  0.000000
8/22/2010	6:34:00 PM	PHl3 MFC set to  0.000000
8/22/2010	6:34:00 PM	SiCl4 MFC set to  0.000000
8/22/2010	6:34:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	6:34:01 PM	Tube furnace set to 0
8/22/2010	6:34:34 PM	Helium valve closed
8/22/2010	6:34:34 PM	H2 valve closed
8/22/2010	6:34:34 PM	BCl3 valve closed
8/22/2010	6:34:34 PM	PH3 valve closed
8/22/2010	6:34:34 PM	SiCl4 pre valve closed
8/22/2010	6:34:34 PM	SiCl4 post valve closed
8/22/2010	6:34:34 PM	Bubbler valve closed
8/22/2010	6:34:34 PM	Main Vac valve opened
8/22/2010	6:34:34 PM	Bypass valve opened
8/22/2010	6:34:34 PM	Helium MFC set to  0.000000
8/22/2010	6:34:34 PM	H2 MFC set to  0.000000
8/22/2010	6:34:34 PM	BCl3 MFC set to  0.000000
8/22/2010	6:34:34 PM	PHl3 MFC set to  0.000000
8/22/2010	6:34:34 PM	SiCl4 MFC set to  0.000000
8/22/2010	6:34:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2010	6:34:35 PM	Tube furnace set to 0
8/22/2010	6:34:35 PM	Run finished at 6:34 PM
8/22/2010	6:34:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
